Design and Electro-Thermo-Mechanical Behavior Analysis of Au/Si3N4 Bimorph Microcantilevers for Static Mode Sensing
This paper presents a design optimization method based on theoretical analysis and numerical calculations, using a commercial multi-physics solver (e.g., ANSYS and ESI CFD-ACE+), for a 3D continuous model, to analyze the bending characteristics of an electrically heated bimorph microcantilever. The...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2017-11-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/17/11/2510 |