Design and Electro-Thermo-Mechanical Behavior Analysis of Au/Si3N4 Bimorph Microcantilevers for Static Mode Sensing
This paper presents a design optimization method based on theoretical analysis and numerical calculations, using a commercial multi-physics solver (e.g., ANSYS and ESI CFD-ACE+), for a 3D continuous model, to analyze the bending characteristics of an electrically heated bimorph microcantilever. The...
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| Format: | Article |
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MDPI AG
2017-11-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/17/11/2510 |
| _version_ | 1798035274161192960 |
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| author | Seok-Won Kang Joe Fragala Su-Ho Kim Debjyoti Banerjee |
| author_facet | Seok-Won Kang Joe Fragala Su-Ho Kim Debjyoti Banerjee |
| author_sort | Seok-Won Kang |
| collection | DOAJ |
| description | This paper presents a design optimization method based on theoretical analysis and numerical calculations, using a commercial multi-physics solver (e.g., ANSYS and ESI CFD-ACE+), for a 3D continuous model, to analyze the bending characteristics of an electrically heated bimorph microcantilever. The results from the theoretical calculation and numerical analysis are compared with those measured using a CCD camera and magnification lenses for a chip level microcantilever array fabricated in this study. The bimorph microcantilevers are thermally actuated by joule heating generated by a 0.4 μm thin-film Au heater deposited on 0.6 μm Si3N4 microcantilevers. The initial deflections caused by residual stress resulting from the thermal bonding of two metallic layers with different coefficients of thermal expansion (CTEs) are additionally considered, to find the exact deflected position. The numerically calculated total deflections caused by electrical actuation show differences of 10%, on average, with experimental measurements in the operating current region (i.e., ~25 mA) to prevent deterioration by overheating. Bimorph microcantilevers are promising components for use in various MEMS (Micro-Electro-Mechanical System) sensing applications, and their deflection characteristics in static mode sensing are essential for detecting changes in thermal stress on the surface of microcantilevers. |
| first_indexed | 2024-04-11T20:55:56Z |
| format | Article |
| id | doaj.art-c61c94a8f9994fbe8e5249b2163e5827 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-11T20:55:56Z |
| publishDate | 2017-11-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-c61c94a8f9994fbe8e5249b2163e58272022-12-22T04:03:41ZengMDPI AGSensors1424-82202017-11-011711251010.3390/s17112510s17112510Design and Electro-Thermo-Mechanical Behavior Analysis of Au/Si3N4 Bimorph Microcantilevers for Static Mode SensingSeok-Won Kang0Joe Fragala1Su-Ho Kim2Debjyoti Banerjee3Korea Railroad Research Institute, 176 Cheoldo bangmulgwan-ro, Uiwang 16105, Gyeonggi-do, KoreaNanoINK, Inc., 215 E Hacienda Ave., Campbell, CA 95008, USAKorea Railroad Research Institute, 176 Cheoldo bangmulgwan-ro, Uiwang 16105, Gyeonggi-do, KoreaDepartment of Mechanical Engineering, Texas A&M University, College Station, TX 77843, USAThis paper presents a design optimization method based on theoretical analysis and numerical calculations, using a commercial multi-physics solver (e.g., ANSYS and ESI CFD-ACE+), for a 3D continuous model, to analyze the bending characteristics of an electrically heated bimorph microcantilever. The results from the theoretical calculation and numerical analysis are compared with those measured using a CCD camera and magnification lenses for a chip level microcantilever array fabricated in this study. The bimorph microcantilevers are thermally actuated by joule heating generated by a 0.4 μm thin-film Au heater deposited on 0.6 μm Si3N4 microcantilevers. The initial deflections caused by residual stress resulting from the thermal bonding of two metallic layers with different coefficients of thermal expansion (CTEs) are additionally considered, to find the exact deflected position. The numerically calculated total deflections caused by electrical actuation show differences of 10%, on average, with experimental measurements in the operating current region (i.e., ~25 mA) to prevent deterioration by overheating. Bimorph microcantilevers are promising components for use in various MEMS (Micro-Electro-Mechanical System) sensing applications, and their deflection characteristics in static mode sensing are essential for detecting changes in thermal stress on the surface of microcantilevers.https://www.mdpi.com/1424-8220/17/11/2510bending responsebimorph microcantileverjoule-heatingresidual stressthermal expansion coefficient (CTE) |
| spellingShingle | Seok-Won Kang Joe Fragala Su-Ho Kim Debjyoti Banerjee Design and Electro-Thermo-Mechanical Behavior Analysis of Au/Si3N4 Bimorph Microcantilevers for Static Mode Sensing Sensors bending response bimorph microcantilever joule-heating residual stress thermal expansion coefficient (CTE) |
| title | Design and Electro-Thermo-Mechanical Behavior Analysis of Au/Si3N4 Bimorph Microcantilevers for Static Mode Sensing |
| title_full | Design and Electro-Thermo-Mechanical Behavior Analysis of Au/Si3N4 Bimorph Microcantilevers for Static Mode Sensing |
| title_fullStr | Design and Electro-Thermo-Mechanical Behavior Analysis of Au/Si3N4 Bimorph Microcantilevers for Static Mode Sensing |
| title_full_unstemmed | Design and Electro-Thermo-Mechanical Behavior Analysis of Au/Si3N4 Bimorph Microcantilevers for Static Mode Sensing |
| title_short | Design and Electro-Thermo-Mechanical Behavior Analysis of Au/Si3N4 Bimorph Microcantilevers for Static Mode Sensing |
| title_sort | design and electro thermo mechanical behavior analysis of au si3n4 bimorph microcantilevers for static mode sensing |
| topic | bending response bimorph microcantilever joule-heating residual stress thermal expansion coefficient (CTE) |
| url | https://www.mdpi.com/1424-8220/17/11/2510 |
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