High-Performance Flux Tracking Controller for Reluctance Actuator
To meet the ever-increasing demand for next-generation lithography machines, the actuator plays an important role in the achievement of high acceleration of the wafer stage. However, the voice coil motor, which is widely used in high-precision positioning systems, is reaching its physical limits. To...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-09-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/13/19/10811 |