LASER ABLATION OF MONOCRYSTALLINE SILICON UNDER PULSED-FREQUENCY FIBER LASER

LASER ABLATION OF MONOCRYSTALLINE SILICON UNDER PULSED-FREQUENCY FIBER LASER

Subject of research. The paper deals with research of the surface ablation for single-crystal silicon wafers and properties of materials obtained in response to silicon ablation while scanning beam radiation of pulse fiber ytterbium laser with a wavelenght λ = 1062 nm in view of variation of radiat...

Full description

Bibliographic Details
Main Authors: V. P. Veiko, A. M. Skvortsov, C. T. Huynh, A. A. Petrov
Format: Article
Language:English
Published: Saint Petersburg National Research University of Information Technologies, Mechanics and Optics (ITMO University) 2015-05-01
Series:Naučno-tehničeskij Vestnik Informacionnyh Tehnologij, Mehaniki i Optiki
Subjects:
laser beam scanning
ablation
oxidation
dislocation
slip lines
microcracks
microstructuring
Online Access:http://ntv.ifmo.ru/file/article/13480.pdf

Internet

http://ntv.ifmo.ru/file/article/13480.pdf

Similar Items