Design and Optimization of a Stationary Electrode in a Vertically-Driven MEMS Inertial Switch for Extending Contact Duration

Design and Optimization of a Stationary Electrode in a Vertically-Driven MEMS Inertial Switch for Extending Contact Duration

A novel micro-electro-mechanical systems (MEMS) inertial microswitch with a flexible contact-enhanced structure to extend the contact duration has been proposed in the present work. In order to investigate the stiffness k of the stationary electrodes, the stationary electrodes with different shapes,...

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Bibliographic Details
Main Authors: Qiu Xu, Zhuo-Qing Yang, Bo Fu, Yan-Ping Bao, Hao Wu, Yun-Na Sun, Meng-Yuan Zhao, Jian Li, Gui-Fu Ding, Xiao-Lin Zhao
Format: Article
Language:English
Published: MDPI AG 2017-03-01
Series:Sensors
Subjects:
inertial micro-switch
surface-micromachining
stationary electrode
geometrical parameters
contact time
Online Access:http://www.mdpi.com/1424-8220/17/3/527

Internet

http://www.mdpi.com/1424-8220/17/3/527

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