A Flexible Printed Circuit Board Based Microelectromechanical Field Mill with a Vertical Movement Shutter Driven by an Electrostatic Actuator
Micromachined electric field mills have received much interest for the measurement of DC fields; however, conventional designs with lateral moving shutters could have shutter lifting in the presence of strong fields, which affects their performance. This paper presents a MEMS electric field mill uti...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-01-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/24/2/439 |