Phosphorus monolayer doping (MLD) of silicon on insulator (SOI) substrates

Phosphorus monolayer doping (MLD) of silicon on insulator (SOI) substrates

This paper details the application of phosphorus monolayer doping of silicon on insulator substrates. There have been no previous publications dedicated to the topic of MLD on SOI, which allows for the impact of reduced substrate dimensions to be probed. The doping was done through functionalization...

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Bibliographic Details
Main Authors: Noel Kennedy, Ray Duffy, Luke Eaton, Dan O’Connell, Scott Monaghan, Shane Garvey, James Connolly, Chris Hatem, Justin D. Holmes, Brenda Long
Format: Article
Language:English
Published: Beilstein-Institut 2018-08-01
Series:Beilstein Journal of Nanotechnology
Subjects:
CMOS
doping
monolayer
silicon
silicon on insulator (SOI)
Online Access:https://doi.org/10.3762/bjnano.9.199

Internet

https://doi.org/10.3762/bjnano.9.199

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