Progress in Traceable Nanoscale Capacitance Measurements Using Scanning Microwave Microscopy

Progress in Traceable Nanoscale Capacitance Measurements Using Scanning Microwave Microscopy

Reference samples are commonly used for the calibration and quantification of nanoscale electrical measurements of capacitances and dielectric constants in scanning microwave microscopy (SMM) and similar techniques. However, the traceability of these calibration samples is not established. In this w...

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Bibliographic Details
Main Authors: François Piquemal, José Morán-Meza, Alexandra Delvallée, Damien Richert, Khaled Kaja
Format: Article
Language:English
Published: MDPI AG 2021-03-01
Series:Nanomaterials
Subjects:
calibration method
micro-capacitor
nanoscale capacitance measurements
reference sample
scanning microwave microscopy
uncertainty budget
Online Access:https://www.mdpi.com/2079-4991/11/3/820

Internet

https://www.mdpi.com/2079-4991/11/3/820

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