Electron-beam lithography of nanostructures at the tips of scanning probe cantilevers
We developed a process to fabricate nanoscale metallic gate electrodes on scanning probe cantilevers, including on the irregular surface of protruding cantilever tips. The process includes a floating-layer technique to coat the cantilevers in an electron-beam resist. We demonstrate gate definition t...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2023-03-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0127665 |