Gas Separation Silica Membranes Prepared by Chemical Vapor Deposition of Methyl-Substituted Silanes

The effect on the gas permeance properties and structural morphology of the presence of methyl functional groups in a silica membrane was studied. Membranes were synthesized via chemical vapor deposition (CVD) at 650 °C and atmospheric pressure using three silicon compounds with differing n...

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Bibliographic Details
Main Authors: Harumi Kato, Sean-Thomas B. Lundin, So-Jin Ahn, Atsushi Takagaki, Ryuji Kikuchi, S. Ted Oyama
Format: Article
Language:English
Published: MDPI AG 2019-11-01
Series:Membranes
Subjects:
Online Access:https://www.mdpi.com/2077-0375/9/11/144