Inline Mapping of Amorphous Silicon Layer Thickness of Heterojunction Precursors Using Multispectral Imaging

Inline Mapping of Amorphous Silicon Layer Thickness of Heterojunction Precursors Using Multispectral Imaging

In this paper, we present an inline characterization technique to determine spatially resolved thickness maps of ultra-thin layers on textured silicon substrates. The technique is based on multispectral imaging and optical modelling of discrete spectral reflectance data using rigorous polarization...

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Main Authors: Saravana Kumar, Christian Diestel, Saed Al-Hajjawi, Jurriaan Schmitz, Marc Hemsendorf, Jonas Haunschild, Stefan J. Rupitsch, Stefan Rein
格式: 文件
语言:English
出版: TIB Open Publishing 2025-01-01
丛编:SiliconPV Conference Proceedings
主题:
Amorphous Silicon
Inline Characterization
Silicon Heterojunction Solar Cells
Thickness Maps
Multispectral Imaging
在线阅读:https://www.tib-op.org/ojs/index.php/siliconpv/article/view/1324

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https://www.tib-op.org/ojs/index.php/siliconpv/article/view/1324

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