Inline Mapping of Amorphous Silicon Layer Thickness of Heterojunction Precursors Using Multispectral Imaging

Inline Mapping of Amorphous Silicon Layer Thickness of Heterojunction Precursors Using Multispectral Imaging

In this paper, we present an inline characterization technique to determine spatially resolved thickness maps of ultra-thin layers on textured silicon substrates. The technique is based on multispectral imaging and optical modelling of discrete spectral reflectance data using rigorous polarization...

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Bibliographic Details
Main Authors: Saravana Kumar, Christian Diestel, Saed Al-Hajjawi, Jurriaan Schmitz, Marc Hemsendorf, Jonas Haunschild, Stefan J. Rupitsch, Stefan Rein
Format: Article
Language:English
Published: TIB Open Publishing 2025-01-01
Series:SiliconPV Conference Proceedings
Subjects:
Amorphous Silicon
Inline Characterization
Silicon Heterojunction Solar Cells
Thickness Maps
Multispectral Imaging
Online Access:https://www.tib-op.org/ojs/index.php/siliconpv/article/view/1324

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