Enhancing Linearity in Parallel-Plate MEMS Varactors through Repulsive Actuation

Enhancing Linearity in Parallel-Plate MEMS Varactors through Repulsive Actuation

This paper presents a new MEMS varactor that uses repulsive actuation to achieve an ultra-linear capacitance-to-voltage response. The approach proposed involves actuating the moveable electrode away from the fixed electrode, instead of the conventional closing-the-gap direction. This increasing-gap...

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Bibliographic Details
Main Authors: Roufaida Bensalem, Mohannad Y. Elsayed, Hani H. Tawfik, Frederic Nabki, Mourad N. El-Gamal
Format: Article
Language:English
Published: MDPI AG 2023-10-01
Series:Micro
Subjects:
microelectromechanical systems (MEMS)
varactor
C–V response
linearity
capacitance
tuning range
Online Access:https://www.mdpi.com/2673-8023/3/4/57

Internet

https://www.mdpi.com/2673-8023/3/4/57

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