Enhancing Linearity in Parallel-Plate MEMS Varactors through Repulsive Actuation
This paper presents a new MEMS varactor that uses repulsive actuation to achieve an ultra-linear capacitance-to-voltage response. The approach proposed involves actuating the moveable electrode away from the fixed electrode, instead of the conventional closing-the-gap direction. This increasing-gap...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-10-01
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| Series: | Micro |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2673-8023/3/4/57 |
| Summary: | This paper presents a new MEMS varactor that uses repulsive actuation to achieve an ultra-linear capacitance-to-voltage response. The approach proposed involves actuating the moveable electrode away from the fixed electrode, instead of the conventional closing-the-gap direction. This increasing-gap movement reduces the capacitance as the actuation voltage increases. The MEMS variable capacitor is fabricated using PolyMUMPs technology and exhibits an excellent linearity factor of 99.7% in capacitance-to-voltage response, and a capacitance tuning ratio of 11× was achieved. The proposed strategy will enable the development of high-performance MEMS-based tunable devices for various applications. |
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| ISSN: | 2673-8023 |