Towards freeform manufacturing of ultra-low expansion glass optics
Ultra-Low-Expansion glass (ULE®) has become an important technological enabler of advanced imaging for astronomy and for extreme-UV lithography. A major limitation though, is that ULE® cannot be poured from the fluid state unlike ZERODUR® which renders costly to produce large and/or complex shapes f...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2023-01-01
|
| Series: | EPJ Web of Conferences |
| Online Access: | https://www.epj-conferences.org/articles/epjconf/pdf/2023/13/epjconf_eosam2023_05012.pdf |