Dynamic Response Analysis of an Immersed Electrothermally Actuated MEMS Mirror
MEMS mirrors have a wide range of applications, most of which require large field-of-view (FOV). Immersing MEMS mirrors in liquid is an effective way to improve the FOV. However, the increased viscosity, convective heat transfer and thermal conductivity in liquid greatly affect the dynamic behaviors...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-02-01
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| Series: | Actuators |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-0825/12/2/83 |