Influence of annealing on structure, phase and electrophysical properties of vanadium oxide films
The aim of this work was to study the effect of the parameters of deposition process and subsequent annealing on the properties of vanadium oxide VOx films deposited by the pulsed reactive magnetron sputtering of a V target in an Ar/O2 gas mixture. The dependences of the structure, phase, te...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | Russian |
| Published: |
Educational institution «Belarusian State University of Informatics and Radioelectronics»
2021-06-01
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| Series: | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
| Subjects: | |
| Online Access: | https://doklady.bsuir.by/jour/article/view/3072 |