A polymeric piezoelectric MEMS accelerometer with high sensitivity, low noise density, and an innovative manufacturing approach

Abstract The piezoelectric coupling principle is widely used (along with capacitive coupling and piezoresistive coupling) for MEMS accelerometers. Piezoelectric MEMS accelerometers are used primarily for vibration monitoring. Polymer piezoelectric MEMS accelerometers offer the merits of heavy-metal-...

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Bibliographic Details
Main Authors: Chang Ge, Edmond Cretu
Format: Article
Language:English
Published: Nature Publishing Group 2023-11-01
Series:Microsystems & Nanoengineering
Online Access:https://doi.org/10.1038/s41378-023-00628-7