RF and Microwave Ion Sources Study at Institute of Modern Physics

RF and Microwave Ion Sources Study at Institute of Modern Physics

Intense ion beam production is of high importance for various versatile applications from accelerator injectors to secondary ion mass spectrometry (SIMS). For these purposes, different types of ion beams are needed and, accordingly, the optimum plasma to produce the desired ion beams. RF-type plasma...

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Bibliographic Details
Main Authors: Qian Y. Jin, Yu G. Liu, Yang Zhou, Qi Wu, Yao J. Zhai, Liang T. Sun
Format: Article
Language:English
Published: MDPI AG 2021-06-01
Series:Plasma
Subjects:
RF plasma
RF coupling
antenna
negative ion
intense ion beam
Online Access:https://www.mdpi.com/2571-6182/4/2/22

Internet

https://www.mdpi.com/2571-6182/4/2/22

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