RF and Microwave Ion Sources Study at Institute of Modern Physics
Intense ion beam production is of high importance for various versatile applications from accelerator injectors to secondary ion mass spectrometry (SIMS). For these purposes, different types of ion beams are needed and, accordingly, the optimum plasma to produce the desired ion beams. RF-type plasma...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2021-06-01
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Series: | Plasma |
Subjects: | |
Online Access: | https://www.mdpi.com/2571-6182/4/2/22 |