Distinguishing physical mechanisms using GISAXS experiments and linear theory: the importance of high wavenumbers
Abstract In this work we analyze GISAXS measurements of the structure factor of Si surfaces evolving during 1 keV Ar+ ion bombardment. Using newly-developed methods sensitive to the full range of experimentally-available wavenumbers q, we extract the linear amplification rate R(q) governing surface...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
Nature Portfolio
2017-05-01
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Series: | Scientific Reports |
Online Access: | https://doi.org/10.1038/s41598-017-01059-x |