Distinguishing physical mechanisms using GISAXS experiments and linear theory: the importance of high wavenumbers

Abstract In this work we analyze GISAXS measurements of the structure factor of Si surfaces evolving during 1 keV Ar+ ion bombardment. Using newly-developed methods sensitive to the full range of experimentally-available wavenumbers q, we extract the linear amplification rate R(q) governing surface...

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Bibliographic Details
Main Authors: Scott A. Norris, Joy C. Perkinson, Mahsa Mokhtarzadeh, Eitan Anzenberg, Michael J. Aziz, Karl F. Ludwig
Format: Article
Language:English
Published: Nature Portfolio 2017-05-01
Series:Scientific Reports
Online Access:https://doi.org/10.1038/s41598-017-01059-x