Distinguishing physical mechanisms using GISAXS experiments and linear theory: the importance of high wavenumbers
Abstract In this work we analyze GISAXS measurements of the structure factor of Si surfaces evolving during 1 keV Ar+ ion bombardment. Using newly-developed methods sensitive to the full range of experimentally-available wavenumbers q, we extract the linear amplification rate R(q) governing surface...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
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Nature Portfolio
2017-05-01
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| Series: | Scientific Reports |
| Online Access: | https://doi.org/10.1038/s41598-017-01059-x |
| _version_ | 1818420172814286848 |
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| author | Scott A. Norris Joy C. Perkinson Mahsa Mokhtarzadeh Eitan Anzenberg Michael J. Aziz Karl F. Ludwig |
| author_facet | Scott A. Norris Joy C. Perkinson Mahsa Mokhtarzadeh Eitan Anzenberg Michael J. Aziz Karl F. Ludwig |
| author_sort | Scott A. Norris |
| collection | DOAJ |
| description | Abstract In this work we analyze GISAXS measurements of the structure factor of Si surfaces evolving during 1 keV Ar+ ion bombardment. Using newly-developed methods sensitive to the full range of experimentally-available wavenumbers q, we extract the linear amplification rate R(q) governing surface stability over a range of wavenumbers 4–5 times larger than has previously been obtained. Comparing with theoretical models also retaining full wavenumber-dependence, we find an excellent fit of the experimental data over the full range of irradiation angles and wavenumbers. Moreover, the fitted parameter values represent experimental evaluation of the magnitudes of most physical mechanisms currently believed to be important to the pattern-formation process. In all cases, the extracted values agree well with direct observations or atomistic simulations of the same quantities, suggesting that GISAXS analysis may allow more powerful comparison between experiment and theory than had previously been thought. |
| first_indexed | 2024-12-14T12:50:15Z |
| format | Article |
| id | doaj.art-c8b23817e2504bc9bfe5290fd0990bb8 |
| institution | Directory Open Access Journal |
| issn | 2045-2322 |
| language | English |
| last_indexed | 2024-12-14T12:50:15Z |
| publishDate | 2017-05-01 |
| publisher | Nature Portfolio |
| record_format | Article |
| series | Scientific Reports |
| spelling | doaj.art-c8b23817e2504bc9bfe5290fd0990bb82022-12-21T23:00:41ZengNature PortfolioScientific Reports2045-23222017-05-017111210.1038/s41598-017-01059-xDistinguishing physical mechanisms using GISAXS experiments and linear theory: the importance of high wavenumbersScott A. Norris0Joy C. Perkinson1Mahsa Mokhtarzadeh2Eitan Anzenberg3Michael J. Aziz4Karl F. Ludwig5Department of Mathematics, Southern Methodist UniversityHarvard School of Engineering and Applied SciencesDepartment of Physics, Boston UniversityDepartment of Physics, Boston UniversityHarvard School of Engineering and Applied SciencesDepartment of Physics, Boston UniversityAbstract In this work we analyze GISAXS measurements of the structure factor of Si surfaces evolving during 1 keV Ar+ ion bombardment. Using newly-developed methods sensitive to the full range of experimentally-available wavenumbers q, we extract the linear amplification rate R(q) governing surface stability over a range of wavenumbers 4–5 times larger than has previously been obtained. Comparing with theoretical models also retaining full wavenumber-dependence, we find an excellent fit of the experimental data over the full range of irradiation angles and wavenumbers. Moreover, the fitted parameter values represent experimental evaluation of the magnitudes of most physical mechanisms currently believed to be important to the pattern-formation process. In all cases, the extracted values agree well with direct observations or atomistic simulations of the same quantities, suggesting that GISAXS analysis may allow more powerful comparison between experiment and theory than had previously been thought.https://doi.org/10.1038/s41598-017-01059-x |
| spellingShingle | Scott A. Norris Joy C. Perkinson Mahsa Mokhtarzadeh Eitan Anzenberg Michael J. Aziz Karl F. Ludwig Distinguishing physical mechanisms using GISAXS experiments and linear theory: the importance of high wavenumbers Scientific Reports |
| title | Distinguishing physical mechanisms using GISAXS experiments and linear theory: the importance of high wavenumbers |
| title_full | Distinguishing physical mechanisms using GISAXS experiments and linear theory: the importance of high wavenumbers |
| title_fullStr | Distinguishing physical mechanisms using GISAXS experiments and linear theory: the importance of high wavenumbers |
| title_full_unstemmed | Distinguishing physical mechanisms using GISAXS experiments and linear theory: the importance of high wavenumbers |
| title_short | Distinguishing physical mechanisms using GISAXS experiments and linear theory: the importance of high wavenumbers |
| title_sort | distinguishing physical mechanisms using gisaxs experiments and linear theory the importance of high wavenumbers |
| url | https://doi.org/10.1038/s41598-017-01059-x |
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