Shape Measurement Method of Two-Dimensional Micro-Structures beyond the Diffraction Limit Based on Speckle Interferometry
A technique based on speckle interferometry for observing microstructures beyond the diffraction limit by detecting the spatial phase distribution of scattered light from microstructures has previously been reported. In this study, the development of this technique using a two-dimensional method is...
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| Format: | Article |
| Language: | English |
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MDPI AG
2021-09-01
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| Series: | Photonics |
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| Online Access: | https://www.mdpi.com/2304-6732/8/10/420 |