Hybrid Adaptive Controller Design with Hysteresis Compensator for a Piezo-Actuated Stage
Piezo-actuated stage (P-AS) has become the topic of considerable interest in the realm of micro/nanopositioning technology in the recent years owing to its advantages, such as high positioning accuracy, high response speed, and large output force. However, rate-dependent (RD) hysteresis, which is an...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2022-12-01
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Series: | Applied Sciences |
Subjects: | |
Online Access: | https://www.mdpi.com/2076-3417/13/1/402 |