Cost-effective equipment for surface pre-treatment for cleaning and excitation of substrates in semiconductor technology

Cost-effective equipment for surface pre-treatment for cleaning and excitation of substrates in semiconductor technology

Abstract Abstract This article presents a cost-effective ultraviolet-ozone cleaner (UV/O3 Cleaner) for surface pre-treatment of substrates in the field of semiconductor technology. The cleaner consists of two chambers, the upper one contains the electronics, including the time counter. The lower cha...

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Bibliographic Details
Main Authors: Dominik Weber, Robert Heimburger, Gianina Schondelmaier, Toni Junghans, Annika Zetzl, Dietrich R. T. Zahn, Daniel Schondelmaier
Format: Article
Language:English
Published: Springer 2022-12-01
Series:SN Applied Sciences
Subjects:
Surface treatment
Contact angle measurement
Wettability
OLEDs
PDMS
TiO2
Online Access:https://doi.org/10.1007/s42452-022-05219-1

Internet

https://doi.org/10.1007/s42452-022-05219-1

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