MEMS Inertial Sensor Calibration Technology: Current Status and Future Trends

A review of various calibration techniques of MEMS inertial sensors is presented in this paper. MEMS inertial sensors are subject to various sources of error, so it is essential to correct these errors through calibration techniques to improve the accuracy and reliability of these sensors. In this p...

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Bibliographic Details
Main Authors: Xu Ru, Nian Gu, Hang Shang, Heng Zhang
Format: Article
Language:English
Published: MDPI AG 2022-05-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/13/6/879