Self-Excited Microcantilever with Higher Mode Using Band-Pass Filter

Microresonators have a variety of scientific and industrial applications. The measurement methods based on the natural frequency shift of a resonator have been studied for a wide range of applications, including the detection of the microscopic mass and measurements of viscosity and stiffness. A hig...

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Bibliographic Details
Main Authors: Yuji Hyodo, Hiroshi Yabuno
Format: Article
Language:English
Published: MDPI AG 2023-03-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/23/5/2849