Self-Excited Microcantilever with Higher Mode Using Band-Pass Filter
Microresonators have a variety of scientific and industrial applications. The measurement methods based on the natural frequency shift of a resonator have been studied for a wide range of applications, including the detection of the microscopic mass and measurements of viscosity and stiffness. A hig...
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| Format: | Article |
| Language: | English |
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MDPI AG
2023-03-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/23/5/2849 |
| _version_ | 1797614326839771136 |
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| author | Yuji Hyodo Hiroshi Yabuno |
| author_facet | Yuji Hyodo Hiroshi Yabuno |
| author_sort | Yuji Hyodo |
| collection | DOAJ |
| description | Microresonators have a variety of scientific and industrial applications. The measurement methods based on the natural frequency shift of a resonator have been studied for a wide range of applications, including the detection of the microscopic mass and measurements of viscosity and stiffness. A higher natural frequency of the resonator realizes an increase in the sensitivity and a higher-frequency response of the sensors. In the present study, by utilizing the resonance of a higher mode, we propose a method to produce the self-excited oscillation with a higher natural frequency without downsizing the resonator. We establish the feedback control signal for the self-excited oscillation using the band-pass filter so that the signal consists of only the frequency corresponding to the desired excitation mode. It results that careful position setting of the sensor for constructing a feedback signal, which is needed in the method based on the mode shape, is not necessary. By the theoretical analysis of the equations governing the dynamics of the resonator coupled with the band-pass filter, it is clarified that the self-excited oscillation is produced with the second mode. Furthermore, the validity of the proposed method is experimentally confirmed by an apparatus using a microcantilever. |
| first_indexed | 2024-03-11T07:09:52Z |
| format | Article |
| id | doaj.art-c97333fac2784709a0726980c38053f0 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-11T07:09:52Z |
| publishDate | 2023-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-c97333fac2784709a0726980c38053f02023-11-17T08:40:34ZengMDPI AGSensors1424-82202023-03-01235284910.3390/s23052849Self-Excited Microcantilever with Higher Mode Using Band-Pass FilterYuji Hyodo0Hiroshi Yabuno1Degrees Programs in Systems and Information Engineering, Graduate School of Science and Technology, University of Tsukuba, Tsukuba 305-8573, Ibaraki, JapanDegrees Programs in Systems and Information Engineering, Graduate School of Science and Technology, University of Tsukuba, Tsukuba 305-8573, Ibaraki, JapanMicroresonators have a variety of scientific and industrial applications. The measurement methods based on the natural frequency shift of a resonator have been studied for a wide range of applications, including the detection of the microscopic mass and measurements of viscosity and stiffness. A higher natural frequency of the resonator realizes an increase in the sensitivity and a higher-frequency response of the sensors. In the present study, by utilizing the resonance of a higher mode, we propose a method to produce the self-excited oscillation with a higher natural frequency without downsizing the resonator. We establish the feedback control signal for the self-excited oscillation using the band-pass filter so that the signal consists of only the frequency corresponding to the desired excitation mode. It results that careful position setting of the sensor for constructing a feedback signal, which is needed in the method based on the mode shape, is not necessary. By the theoretical analysis of the equations governing the dynamics of the resonator coupled with the band-pass filter, it is clarified that the self-excited oscillation is produced with the second mode. Furthermore, the validity of the proposed method is experimentally confirmed by an apparatus using a microcantilever.https://www.mdpi.com/1424-8220/23/5/2849MEMSmicrocantileverself-excited oscillationhigher mode |
| spellingShingle | Yuji Hyodo Hiroshi Yabuno Self-Excited Microcantilever with Higher Mode Using Band-Pass Filter Sensors MEMS microcantilever self-excited oscillation higher mode |
| title | Self-Excited Microcantilever with Higher Mode Using Band-Pass Filter |
| title_full | Self-Excited Microcantilever with Higher Mode Using Band-Pass Filter |
| title_fullStr | Self-Excited Microcantilever with Higher Mode Using Band-Pass Filter |
| title_full_unstemmed | Self-Excited Microcantilever with Higher Mode Using Band-Pass Filter |
| title_short | Self-Excited Microcantilever with Higher Mode Using Band-Pass Filter |
| title_sort | self excited microcantilever with higher mode using band pass filter |
| topic | MEMS microcantilever self-excited oscillation higher mode |
| url | https://www.mdpi.com/1424-8220/23/5/2849 |
| work_keys_str_mv | AT yujihyodo selfexcitedmicrocantileverwithhighermodeusingbandpassfilter AT hiroshiyabuno selfexcitedmicrocantileverwithhighermodeusingbandpassfilter |