Wetting Properties of Transparent Anatase/Rutile Mixed Phase Glancing Angle Magnetron Sputtered Nano-TiO<sub>2</sub> Films
Transparent polycrystalline TiO<sub>2</sub> thin films have been deposited on unheated glass substrates using RF reactive magnetron sputtering. Depositions were carried out at different glancing angles and with different total gas mixture pressures. The variation of these parameters affe...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-06-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/11/6/616 |