Wetting Properties of Transparent Anatase/Rutile Mixed Phase Glancing Angle Magnetron Sputtered Nano-TiO<sub>2</sub> Films

Wetting Properties of Transparent Anatase/Rutile Mixed Phase Glancing Angle Magnetron Sputtered Nano-TiO<sub>2</sub> Films

Transparent polycrystalline TiO<sub>2</sub> thin films have been deposited on unheated glass substrates using RF reactive magnetron sputtering. Depositions were carried out at different glancing angles and with different total gas mixture pressures. The variation of these parameters affe...

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Bibliographic Details
Main Authors:	Vasiliki Vrakatseli, Ergina Farsari, Dimitrios Mataras
Format:	Article
Language:	English
Published:	MDPI AG 2020-06-01
Series:	Micromachines
Subjects:	mixed phase TiO<sub>2</sub> glancing angle RF magnetron sputtering reversible wettability
Online Access:	https://www.mdpi.com/2072-666X/11/6/616

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