Enhanced ozone gas detection with Sb doped ZnO nanorods synthesized on MEMS microheater
Metal oxide semiconductors infused with noble metals or metalloids are studied and employed in semiconductor sensors applications to a greater extent. In this study, antimony (Sb) is doped with ZnO in 4 different concentrations to compare the optimal parameters in gas sensing properties. Sb/ZnO nano...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2024-06-01
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| Series: | Sensors and Actuators Reports |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2666053924000079 |