Enhanced ozone gas detection with Sb doped ZnO nanorods synthesized on MEMS microheater
Metal oxide semiconductors infused with noble metals or metalloids are studied and employed in semiconductor sensors applications to a greater extent. In this study, antimony (Sb) is doped with ZnO in 4 different concentrations to compare the optimal parameters in gas sensing properties. Sb/ZnO nano...
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| Format: | Article |
| Language: | English |
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Elsevier
2024-06-01
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| Series: | Sensors and Actuators Reports |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2666053924000079 |
| _version_ | 1797234362554515456 |
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| author | Yempati Nagarjuna Yu-Jen Hsiao Wen-Tse Hsiao Zheng-Xi Li Meichun Lin |
| author_facet | Yempati Nagarjuna Yu-Jen Hsiao Wen-Tse Hsiao Zheng-Xi Li Meichun Lin |
| author_sort | Yempati Nagarjuna |
| collection | DOAJ |
| description | Metal oxide semiconductors infused with noble metals or metalloids are studied and employed in semiconductor sensors applications to a greater extent. In this study, antimony (Sb) is doped with ZnO in 4 different concentrations to compare the optimal parameters in gas sensing properties. Sb/ZnO nanostructure is synthesized by hydrothermal process and deposited on MEMS (Micro electro mechanical system) microheater device. The morphology of the nanostructure is analyzed for planar structure, oxidation states and the presence of Sb/ZnO is successfully verified. Ozone is a powerful oxidizing gas which is a health hazard in public places, so low concentrations of ozone is tested with Sb/ZnO sensor at various parameters. Since Sb acts as catalyst to promote the gas sensing properties, the sensor responses have been enhanced compared to pure ZnO sensor. Sensor performed its best at 200 °C and has the lowest detection gas concentration of 10 ppb. Sb/ZnO showed good selectivity over ozone gas. |
| first_indexed | 2024-04-24T16:30:52Z |
| format | Article |
| id | doaj.art-c992ff15f29e44e28a1d3daf63f68ce1 |
| institution | Directory Open Access Journal |
| issn | 2666-0539 |
| language | English |
| last_indexed | 2024-04-24T16:30:52Z |
| publishDate | 2024-06-01 |
| publisher | Elsevier |
| record_format | Article |
| series | Sensors and Actuators Reports |
| spelling | doaj.art-c992ff15f29e44e28a1d3daf63f68ce12024-03-30T04:40:08ZengElsevierSensors and Actuators Reports2666-05392024-06-017100191Enhanced ozone gas detection with Sb doped ZnO nanorods synthesized on MEMS microheaterYempati Nagarjuna0Yu-Jen Hsiao1Wen-Tse Hsiao2Zheng-Xi Li3Meichun Lin4Department of Mechanical Engineering, Southern Taiwan University of Science and Technology, Tainan 710, TaiwanDepartment of Vehicle Engineering, National Kaohsiung University of Science and Technology, Kaohsiung 807, Taiwan; Corresponding author.Taiwan Instrument Research Institute, National Applied Research Laboratories, Hsinchu 300, TaiwanDepartment of Mechanical Engineering, Southern Taiwan University of Science and Technology, Tainan 710, TaiwanDepartment of Finance and International Business, Fu Jen Catholic University, New Taipei City 242062, TaiwanMetal oxide semiconductors infused with noble metals or metalloids are studied and employed in semiconductor sensors applications to a greater extent. In this study, antimony (Sb) is doped with ZnO in 4 different concentrations to compare the optimal parameters in gas sensing properties. Sb/ZnO nanostructure is synthesized by hydrothermal process and deposited on MEMS (Micro electro mechanical system) microheater device. The morphology of the nanostructure is analyzed for planar structure, oxidation states and the presence of Sb/ZnO is successfully verified. Ozone is a powerful oxidizing gas which is a health hazard in public places, so low concentrations of ozone is tested with Sb/ZnO sensor at various parameters. Since Sb acts as catalyst to promote the gas sensing properties, the sensor responses have been enhanced compared to pure ZnO sensor. Sensor performed its best at 200 °C and has the lowest detection gas concentration of 10 ppb. Sb/ZnO showed good selectivity over ozone gas.http://www.sciencedirect.com/science/article/pii/S2666053924000079Sb doped ZnOMEMS microheaterOzone gas sensing |
| spellingShingle | Yempati Nagarjuna Yu-Jen Hsiao Wen-Tse Hsiao Zheng-Xi Li Meichun Lin Enhanced ozone gas detection with Sb doped ZnO nanorods synthesized on MEMS microheater Sensors and Actuators Reports Sb doped ZnO MEMS microheater Ozone gas sensing |
| title | Enhanced ozone gas detection with Sb doped ZnO nanorods synthesized on MEMS microheater |
| title_full | Enhanced ozone gas detection with Sb doped ZnO nanorods synthesized on MEMS microheater |
| title_fullStr | Enhanced ozone gas detection with Sb doped ZnO nanorods synthesized on MEMS microheater |
| title_full_unstemmed | Enhanced ozone gas detection with Sb doped ZnO nanorods synthesized on MEMS microheater |
| title_short | Enhanced ozone gas detection with Sb doped ZnO nanorods synthesized on MEMS microheater |
| title_sort | enhanced ozone gas detection with sb doped zno nanorods synthesized on mems microheater |
| topic | Sb doped ZnO MEMS microheater Ozone gas sensing |
| url | http://www.sciencedirect.com/science/article/pii/S2666053924000079 |
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