Robust Tracking Control of Piezo-Actuated Nanopositioning Stage Using Improved Inverse LSSVM Hysteresis Model and RST Controller
Nanopositioning technology is widely used in high-resolution applications. It often uses piezoelectric actuators due to their superior characteristics. However, piezoelectric actuators exhibit a hysteresis phenomenon that limits their positioning accuracy. To compensate for the hysteresis effect, de...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-11-01
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| Series: | Actuators |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-0825/11/11/324 |