Enhancing Manufacturability of SU-8 Piezoelectric Composite Films for Microsystem Applications

Enhancing Manufacturability of SU-8 Piezoelectric Composite Films for Microsystem Applications

Piezoelectric thin films are extensively used as sensing or actuating layers in various micro-electromechanical systems (MEMS) applications. However, most piezoelectrics are stiff ceramics, and current polymer piezoelectrics are not compatible with microfabrication due to their low Curie Temperature...

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Bibliographic Details
Main Authors: Irma Rocio Vazquez, Zeynel Guler, Nathan Jackson
Format: Article
Language:English
Published: MDPI AG 2024-03-01
Series:Micromachines
Subjects:
piezoelectric
thin films
microelectromechanical systems
SU-8
composite
Online Access:https://www.mdpi.com/2072-666X/15/3/397

Internet

https://www.mdpi.com/2072-666X/15/3/397

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