Recent Advances in MEMS-Based 3D Hemispherical Resonator Gyroscope (HRG)—A Sensor of Choice

Recent Advances in MEMS-Based 3D Hemispherical Resonator Gyroscope (HRG)—A Sensor of Choice

Macro-scale, hemispherical-shaped resonating gyroscopes are used in high-precision motion and navigation applications. In these gyroscopes, a 3D wine-glass, hemispherical-shaped resonating structure is used as the main sensing element. Motivated by the success of macroscale hemispherical shape gyros...

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Bibliographic Details
Main Authors: Ahmad Rahbar Ranji, Vijayakanthan Damodaran, Kevin Li, Zilang Chen, Shahpour Alirezaee, Mohammed Jalal Ahamed
Format: Article
Language:English
Published: MDPI AG 2022-10-01
Series:Micromachines
Subjects:
dynamic performance
fused silica
glassblowing
hemispherical resonator gyroscope
MEMS
Online Access:https://www.mdpi.com/2072-666X/13/10/1676

Internet

https://www.mdpi.com/2072-666X/13/10/1676

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