Design and Experiment for Dual-Mass MEMS Gyroscope Sensing Closed-Loop System
A closed-loop controlling system for Micro Electro Mechanical System (MEMS) gyroscope sense mode is investigated in this paper, and the controller is designed to achieve low error, wide bandwidth and low noise capability. The gyroscope monitoring system includes four independent closed-loop, and is...
| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2020-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9018052/ |