STRUCTURE OPTIMIZATION OF MICROBRIDGE BASED ON MEMS ULTRASONIC TRANSDUCER

STRUCTURE OPTIMIZATION OF MICROBRIDGE BASED ON MEMS ULTRASONIC TRANSDUCER

Aimed at the low frequency of traditional ultrasonic transducers in low frequency domain,a new theoretical model of microbridge was designed,with analysis and research of the mechanical behavior. Solid modeling,modal analysis and electrostatic analysis were carried out with COMSOL 5. 4 for the silic...

Full description

Bibliographic Details
Main Authors: HE JianLong, AN Kun, YANG LiangXing, WANG YaFeng, LIU Jie, MENG Jiang
Format: Article
Language:zho
Published: Editorial Office of Journal of Mechanical Strength 2021-01-01
Series:Jixie qiangdu
Subjects:
Ultrasonic transducer;Microbridge;Antiferroelectric thick film;Effect of phase-transition induced strain;Orthogonal design
Online Access:http://www.jxqd.net.cn/thesisDetails#10.16579/j.issn.1001.9669.2021.02.034

Internet

http://www.jxqd.net.cn/thesisDetails#10.16579/j.issn.1001.9669.2021.02.034

Similar Items