Influence of energy loss function to the Monte Carlo simulated electron backscattering coefficient
Abstract We report an improved calculation of the electron backscattering coefficients (BSCs) for beryllium, molybdenum and tungsten at electron energies of 0.1–100 keV based on an up-to-date Monte Carlo simulation method with different input of energy loss function (ELF) data. The electron inelasti...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2022-10-01
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| Series: | Scientific Reports |
| Online Access: | https://doi.org/10.1038/s41598-022-20466-3 |