Silicone engineered anisotropic lithography for ultrahigh-density OLEDs
Ultrahigh-resolution patterning with high-throughput and high-fidelity is highly in demand for expanding the potential of OLEDs. Here, the authors report that silicone-incorporated organic light-emitting semiconductors can achieve anisotropic lithography via reactive ion etching-coupled photolithogr...
Main Authors: | , , , , , , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Nature Portfolio
2022-12-01
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Series: | Nature Communications |
Online Access: | https://doi.org/10.1038/s41467-022-34531-y |