Research progress on SiMOC coatings prepared by polymer pyrolysis and chemical vapor deposition
ABSTRACTThe SiOC materials have shown great potential for a number of engineering applications owing to their excellent physical and chemical properties. Due to the unique microstructure of SiOC coatings, different variants of polymer pyrolysis and chemical vapor deposition (CVD) processes are used...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Taylor & Francis Group
2023-12-01
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| Series: | Heat Treatment and Surface Engineering |
| Subjects: | |
| Online Access: | https://www.tandfonline.com/doi/10.1080/25787616.2023.2173046 |