A Central Array Method to Locate Chips in AOI Systems in Semiconductor Manufacturing

A Central Array Method to Locate Chips in AOI Systems in Semiconductor Manufacturing

For semiconductor manufacturing, automatic optical inspections (AOIs) are important for chip quality inspection. An AOI system contains a robot arm, an industrial camera, a x-y platform, and a visual inspection module. Using the industrial camera, a wafer map can be obtained and then sent to the vis...

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Bibliographic Details
Main Authors: Huichu Fu, Yiming Lai, Chunrong Pan, Siwei Zhang, Liping Bai, Jie Li
Format: Article
Language:English
Published: MDPI AG 2024-03-01
Series:Electronics
Subjects:
automatic optical inspection
defect recognition
semiconductor wafer map
feature extraction
Online Access:https://www.mdpi.com/2079-9292/13/6/1070

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https://www.mdpi.com/2079-9292/13/6/1070

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