Toward Controlled Fluidized Bed – Chemical Vapor Deposition of Boron Nitride: Thermochemical Analysis and Microstructural Investigations
Abstract This study examines the optimization and characterization of stoichiometric and carbon‐free boron nitride interphase coatings using triethylamine borane complex as a precursor in the Fluidized Bed Chemical Vapor Deposition process. It highlights the importance of optimizing chemical vapor d...
Main Authors: | , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Wiley-VCH
2024-12-01
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Series: | Advanced Materials Interfaces |
Subjects: | |
Online Access: | https://doi.org/10.1002/admi.202400452 |