High numerical aperture reflective deep ultraviolet Fourier ptychographic microscopy for nanofeature imaging
Pushing the resolution limit to the nanoscale is a critical challenge for applying the reflective Fourier ptychographic microscopy (FPM) to metrologies for characterization of nanoscale features. Characterization of opaque nanoscale samples using reflective FPM requires chiefly a light source with s...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2022-09-01
|
| Series: | APL Photonics |
| Online Access: | http://dx.doi.org/10.1063/5.0102413 |