A Detailed Analysis of the Dynamic Behavior of a MEMS Vibrating Internal Ring Gyroscope

A Detailed Analysis of the Dynamic Behavior of a MEMS Vibrating Internal Ring Gyroscope

This paper presents the development of an analytical model of an internal vibrating ring gyroscope in a Microelectromechanical System (MEMS). The internal ring structure consists of eight semicircular beams that are attached to the externally placed anchors. This research work analyzes the vibrating...

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Bibliographic Details
Main Authors: Waqas Amin Gill, Ian Howard, Ilyas Mazhar, Kristoffer McKee
Format: Article
Language:English
Published: MDPI AG 2024-08-01
Series:Micromachines
Subjects:
MEMS
MEMS gyroscope
vibrating ring gyroscope
dynamics
motion equations
resonance frequency
Online Access:https://www.mdpi.com/2072-666X/15/9/1107

Internet

https://www.mdpi.com/2072-666X/15/9/1107

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