Loss in discharging atoms through artificial hole for fabricating metallic micro/nanowire by electromigration
The electromigration (EM) technique is a method that is used to ensure the physical growth of metallic micro/nanowires. In the EM technique, the atomic diffusion of metals is intentionally accelerated by controlling the input current and heating the substrate, thus forming a hillock owing to the acc...
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| Format: | Article |
| Language: | English |
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The Japan Society of Mechanical Engineers
2019-02-01
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| Series: | Mechanical Engineering Journal |
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| Online Access: | https://www.jstage.jst.go.jp/article/mej/6/1/6_18-00269/_pdf/-char/en |