Selective ultrashort laser annealing of amorphous Ge/Si multilayer stacks

Selective ultrashort laser annealing of amorphous Ge/Si multilayer stacks

We report on single-short laser crystallization of Ge/Si multilayer stacks consisting of alternating amorphous nanosized films of silicon and germanium using near- and mid-infrared femtosecond and picosecond laser pulses. The phase composition of the irradiated stacks was investigated by the Raman s...

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Bibliographic Details
Main Authors: Bulgakova Nadezhda M., Volodin Vladimir A., Cheng Yuzhu, Levy Yoann, Beránek Jiří, Nagisetty Siva S., Zukerstein Martin, Popov Alexander A., Bulgakov Alexander V.
Format: Article
Language:English
Published: EDP Sciences 2022-01-01
Series:EPJ Web of Conferences
Online Access:https://www.epj-conferences.org/articles/epjconf/pdf/2022/10/epjconf_eosam2022_06012.pdf

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https://www.epj-conferences.org/articles/epjconf/pdf/2022/10/epjconf_eosam2022_06012.pdf

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