Sputtered high perpendicular magnetic anisotropy CoPt thin film on flexible substrate at low temperature
In this study, CoPt alloy thin films with alternative sputtering of 0.4 nm-Co and 0.5 nm-Pt layers, [Co0.4/Pt0.5]n, on Pt underlayers were sputtered on rigid glass and soft PI (Polyimide) substrates at 100°C. The effects of repetition (n) of the [Co0.4/Pt0.5]n films on the magnetic properties and mi...
| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2020-01-01
|
| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5129915 |