Thermal roll-to-roll nanoimprinting using a replica mold without release agent
Thermal roll-to-roll nanoimprint (T-R2RNIL) using a flexible replica mold made of a special UV-curable resin was demonstrated. This UV-curable resin is able to be used for the nanoimprint process without a release agent. In this study, we examined the relationship between the hardness of the UV-cura...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
The Japan Society of Mechanical Engineers
2018-10-01
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| Series: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/jamdsm/12/5/12_2018jamdsm0101/_pdf/-char/en |