Planar Micro-Positioning Device Based on a 3D Digital Electromagnetic Actuator
In this paper, a novel micro-positioning device based on a 3D digital actuator is presented. The proposed system allows realizing planar motions of micro-objects, which could be implemented in several applications where micro-positioning tasks are needed such as micro-component manufacturing/assembl...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-11-01
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| Series: | Actuators |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-0825/10/12/310 |