APA (7th ed.) Citation

al, T. I. e. (2007). Heavy arsenic doping of silicon grown by atmospheric pressure selective epitaxial chemical vapor deposition. Taylor & Francis Group.

Chicago Style (17th ed.) Citation

al, Tetsuya Ikuta et. Heavy Arsenic Doping of Silicon Grown by Atmospheric Pressure Selective Epitaxial Chemical Vapor Deposition. Taylor & Francis Group, 2007.

MLA (9th ed.) Citation

al, Tetsuya Ikuta et. Heavy Arsenic Doping of Silicon Grown by Atmospheric Pressure Selective Epitaxial Chemical Vapor Deposition. Taylor & Francis Group, 2007.

Warning: These citations may not always be 100% accurate.