al, T. I. e. (2007). Heavy arsenic doping of silicon grown by atmospheric pressure selective epitaxial chemical vapor deposition. Taylor & Francis Group.
Chicago Style (17th ed.) Citational, Tetsuya Ikuta et. Heavy Arsenic Doping of Silicon Grown by Atmospheric Pressure Selective Epitaxial Chemical Vapor Deposition. Taylor & Francis Group, 2007.
MLA (9th ed.) Citational, Tetsuya Ikuta et. Heavy Arsenic Doping of Silicon Grown by Atmospheric Pressure Selective Epitaxial Chemical Vapor Deposition. Taylor & Francis Group, 2007.
Warning: These citations may not always be 100% accurate.